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Categories Aligner Special OfferAligner Special OfferBest Technology + Best Price -> BEST CHOICE  EVG®620 – up to 150mmHighest flexibility for optical double-side lithography and backside alignment up to 150 mm.  EVG®6200∞ Infinity – up to 200mmThe production tool for wafers up to 200mm. Optimized for highest throughput.  IQ Aligner® – up to 300mmHigh-end lithography tool for 100% proximity processing up to 300 mm. Increased throuput, and significantly reduced total cost of ownership (TCO). |
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